JPH0514509Y2 - - Google Patents
Info
- Publication number
- JPH0514509Y2 JPH0514509Y2 JP9346887U JP9346887U JPH0514509Y2 JP H0514509 Y2 JPH0514509 Y2 JP H0514509Y2 JP 9346887 U JP9346887 U JP 9346887U JP 9346887 U JP9346887 U JP 9346887U JP H0514509 Y2 JPH0514509 Y2 JP H0514509Y2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- voltage
- electrolytic
- predetermined regions
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 58
- 239000004065 semiconductor Substances 0.000 claims description 57
- 238000000866 electrolytic etching Methods 0.000 claims description 17
- 238000005530 etching Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 description 18
- 239000002184 metal Substances 0.000 description 18
- 238000010586 diagram Methods 0.000 description 5
- 239000008151 electrolyte solution Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000003792 electrolyte Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003411 electrode reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- YXIFBDPASYPBNG-UHFFFAOYSA-N osmium tungsten Chemical compound [W].[Os] YXIFBDPASYPBNG-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9346887U JPH0514509Y2 (en]) | 1987-06-19 | 1987-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9346887U JPH0514509Y2 (en]) | 1987-06-19 | 1987-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS64330U JPS64330U (en]) | 1989-01-05 |
| JPH0514509Y2 true JPH0514509Y2 (en]) | 1993-04-19 |
Family
ID=30956072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9346887U Expired - Lifetime JPH0514509Y2 (en]) | 1987-06-19 | 1987-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0514509Y2 (en]) |
-
1987
- 1987-06-19 JP JP9346887U patent/JPH0514509Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS64330U (en]) | 1989-01-05 |
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